"Investigation of reliability of NO nitrided SiC(1100) MOS devices."

Takato Nakanuma et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764595

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Takato Nakanuma, Asato Suzuki, Yu Iwakata, Takuma Kobayashi, Mitsuru Sometani, Mitsuo Okamoto, Takuji Hosoi, Takayoshi Shimura, Heiji Watanabe:
Investigation of reliability of NO nitrided SiC(1100) MOS devices. IRPS 2022: 3

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