"Cathodoluminescence spectroscopy for failure analysis and process ..."

C. Monachon et al. (2018)

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DOI: 10.1109/IRPS.2018.8353623

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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C. Monachon, Marcin Stefan Zielinski, J. Berney, D. Poppitz, Andreas Graff, Steffen Breuer, Lutz Kirste:
Cathodoluminescence spectroscopy for failure analysis and process development of GaN-based microelectronic devices. IRPS 2018: 6

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