"Accurate screening of defective oxide on SiC using consecutive multiple ..."

Hiroshi Miki et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764583

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-31

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Hiroshi Miki, M. Sagawa, Y. Mori, T. Murata, K. Kinoshita, K. Asaka, T. Oda:
Accurate screening of defective oxide on SiC using consecutive multiple threshold-voltage measurements. IRPS 2022: 8

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