"Impact of oxide liner properties on TSV Cu pumping and TSV stress."

Joke De Messemaeker et al. (2015)

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DOI: 10.1109/IRPS.2015.7112736

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-01

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Joke De Messemaeker, O. Varela Pedreira, A. Moussa, Nabi Nabiollahi, Kris Vanstreels, Stefaan Van Huylenbroeck, Harold Philipsen, Patrick Verdonck, Bart Vandevelde, Ingrid De Wolf, Eric Beyne, Kris Croes:
Impact of oxide liner properties on TSV Cu pumping and TSV stress. IRPS 2015: 4

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