"Plasma processing induced charging damage (PID) assessment with ..."

Andreas Martin (2022)

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DOI: 10.1109/IRPS48227.2022.9764556

access: closed

type: Conference or Workshop Paper

metadata version: 2022-05-13

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Andreas Martin:
Plasma processing induced charging damage (PID) assessment with appropriate fWLR stress methods ensuring expected MOS reliability and lifetimes for automotive products (Invited). IRPS 2022: 5

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