"Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps."

Alicja Lesniewska et al. (2021)

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DOI: 10.1109/IRPS46558.2021.9405192

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Alicja Lesniewska, Olalla Varela Pedreira, Melina Lofrano, Gayle Murdoch, Marleen H. van der Veen, Anish Dangol, Naoto Horiguchi, Zsolt Tökei, Kris Croes:
Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps. IRPS 2021: 1-6

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