"Transistor Reliability Characterization for Advanced DRAM with HK+MG & ..."

Nam-Hyun Lee et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764439

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-03

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Nam-Hyun Lee, Sunhang Lee, S.-H. Kim, G.-J. Kim, K. W. Lee, Y. S. Lee, Y. C. Hwang, H. S. Kim, S. Pae:
Transistor Reliability Characterization for Advanced DRAM with HK+MG & EUV process technology. IRPS 2022: 6

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