"Performance and Reliability of Nanosheet Oxide Semiconductor FETs with ..."

Masaharu Kobayashi et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529363

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-29

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Masaharu Kobayashi, Kaito Hikake, Zhuo Li, Junxiang Hao, Chitra Pandy, Takuya Saraya, Toshiro Hiramoto, Takanori Takahashi, Mutsunori Uenuma, Yukiharu Uraoka:
Performance and Reliability of Nanosheet Oxide Semiconductor FETs with ALD-Grown InGaO for 3D Integration (Invited). IRPS 2024: 9

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