"Monolithic 3D Integration of Oxide Semiconductor FETs and Memory Devices ..."

Masaharu Kobayashi (2022)

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DOI: 10.1109/IRPS48227.2022.9764534

access: closed

type: Conference or Workshop Paper

metadata version: 2022-05-09

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Masaharu Kobayashi:
Monolithic 3D Integration of Oxide Semiconductor FETs and Memory Devices for AI Acceleration (Invited). IRPS 2022: 1-6

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