"Drastic reliability improvement using H2O2/UV treatment of HfO2 for ..."

Seung-Mo Kim et al. (2021)

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DOI: 10.1109/IRPS46558.2021.9405126

access: closed

type: Conference or Workshop Paper

metadata version: 2021-05-20

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  - conf/irps/KimNOLKLKSHL21
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Seung-Mo Kim, Thi Mi Hanh Nyugen, Jungwon Oh, Yongsu Lee, Soo Cheol Kang, Ho-In Lee, Cihyun Kim, Surajit Some, Hyeon Jun Hwang, Byoung Hun Lee:
Drastic reliability improvement using H2O2/UV treatment of HfO2 for heterogeneous integration. IRPS 2021: 1-6

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