"Investigation of Sub-20nm 4th generation DRAM cell transistor's parasitic ..."

Shinwoo Jeong et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10118270

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-28

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Shinwoo Jeong, Jin-Seong Lee, Jiuk Jang, Jooncheol Kim, Hyunsu Shin, Jihun Kim, Jeongwoo Song, Dongsoo Woo, Jeonghoon Oh, Jooyoung Lee:
Investigation of Sub-20nm 4th generation DRAM cell transistor's parasitic resistance and scalable methodology for Sub-20nm era. IRPS 2023: 1-6

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