"Robust BEOL MIMCAP for Long and Controllable TDDB Lifetime."

Lili Cheng et al. (2019)

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DOI: 10.1109/IRPS.2019.8720407

access: closed

type: Conference or Workshop Paper

metadata version: 2019-05-31

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Lili Cheng, Seungman Choi, Sean P. Ogden, Teck Jung Tang, Robert Fox:
Robust BEOL MIMCAP for Long and Controllable TDDB Lifetime. IRPS 2019: 1-3

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