"New insight in plasma charging impact on gate oxide breakdown in FDSOI ..."

M. Akbal, G. Ribes, L. Vallier (2015)

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DOI: 10.1109/IRPS.2015.7112820

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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M. Akbal, G. Ribes, L. Vallier:
New insight in plasma charging impact on gate oxide breakdown in FDSOI technology. IRPS 2015: 2

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