"Micro/nano displacement sensor for piezoelectric actuator with multi-stage ..."

Yong Yu et al. (2010)

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DOI: 10.1109/IROS.2010.5650144

access: closed

type: Conference or Workshop Paper

metadata version: 2019-04-03

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Yong Yu, Bo Song, Renbing Chen, YunJian Ge:
Micro/nano displacement sensor for piezoelectric actuator with multi-stage expansion mechanism. IROS 2010: 2618-2624

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