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"On-chip integration of ultra-thin glass cantilever for physical property ..."
Tao Tang et al. (2020)
- Tao Tang, Yansheng Hao, Yigang Shen, Yo Tanaka, Ming Huang, Yoichiroh Hosokawa, Ming Li, Yaxiaer Yalikun:
On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse. IROS 2020: 2780-2785
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