"Overcome the End of Life of 3D Flash Memory by Recovery Annealing, Aiming ..."

Hitomi Tanaka et al. (2024)

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DOI: 10.1109/IMW59701.2024.10536962

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-10

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Hitomi Tanaka, Hajime Sano, Reika Ichihara, Yuta Aiba, Kazuma Hasegawa, Kana Kudo, Chieko Tokunaga, Yasuhito Yoshimizu, Fumie Kikushima, Tomoya Sanuki:
Overcome the End of Life of 3D Flash Memory by Recovery Annealing, Aiming for Carbon Neutrality in Semiconductor Manufacturing. IMW 2024: 1-4

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