"CMOS-Compatible Low-T Processing Methods for HZO-based DRAM capacitors by ..."

Yuanbiao Li et al. (2024)

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DOI: 10.1109/IMW59701.2024.10536977

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Yuanbiao Li, Xinyi Tang, Guangwei Xu, Songming Miao, Xiao Chen, Jiachen Li, Di Lu, Shibing Long:
CMOS-Compatible Low-T Processing Methods for HZO-based DRAM capacitors by E-field Cycling. IMW 2024: 1-4

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