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"Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS ..."
David Lehninger et al. (2022)
- David Lehninger, Hannes Mähne, Tarek Ali, Raik Hoffmann, Ricardo Olivo, Maximilian Lederer
, Konstantin Mertens, Thomas Kämpfe
, Kati Biedermann, Matthias Landwehr, Andreas Heinig, Defu Wang, Yukai Shen
, Kerstin Bernert, Steffen Thiem, Konrad Seidel:
Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology. IMW 2022: 1-4
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