"Optimization of Retention in Ferroelectricity Boosted Gate Stacks for 3D NAND."

Laurent Breuil et al. (2023)

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DOI: 10.1109/IMW56887.2023.10145986

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-13

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Laurent Breuil, Mihaela Ioana Popovici, J. Stiers, Antonio Arreghini, S. Ramesh, Geert Van den Bosch, Jan Van Houdt, Maarten Rosmeulen:
Optimization of Retention in Ferroelectricity Boosted Gate Stacks for 3D NAND. IMW 2023: 1-4

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