"Simulation-Based 'Smart' Operation Management System for Semiconductor ..."

Byoung Kyu Choi, Byung H. Kim (2015)

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DOI: 10.1007/978-3-319-22759-7_10

access: open

type: Conference or Workshop Paper

metadata version: 2019-08-20

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Byoung Kyu Choi, Byung H. Kim:
Simulation-Based 'Smart' Operation Management System for Semiconductor Manufacturing. APMS (2) 2015: 82-89

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