"Approach for the 3D-Alignment in Micro- and Nano-scale Assembly Processes."

Thomas Wich et al. (2010)

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DOI: 10.1007/978-3-642-11598-1_19

access: open

type: Conference or Workshop Paper

metadata version: 2018-06-26

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Thomas Wich, Christian Stolle, Manuel Mikczinski, Sergej Fatikow:
Approach for the 3D-Alignment in Micro- and Nano-scale Assembly Processes. IPAS 2010: 167-173

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