"Parallel Algorithm of SOI Layout Decomposition for Double Patterning ..."

Vladimir Verstov, Vadim A. Shakhnov, Lyudmila Zinchenko (2014)

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DOI: 10.1007/978-3-642-54734-8_60

access: open

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Vladimir Verstov, Vadim A. Shakhnov, Lyudmila Zinchenko:
Parallel Algorithm of SOI Layout Decomposition for Double Patterning Lithography on High-Performance Computer Platforms. DoCEIS 2014: 543-550

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