"Precision Assembling and Hybrid Bonding for Micro Fluidic Systems."

Agathe Koller-Hodac, Manuel Altmeyer, Silvio Walpen (2010)

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DOI: 10.1007/978-3-642-11598-1_7

access: open

type: Conference or Workshop Paper

metadata version: 2018-06-26

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Agathe Koller-Hodac, Manuel Altmeyer, Silvio Walpen:
Precision Assembling and Hybrid Bonding for Micro Fluidic Systems. IPAS 2010: 65-72

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