"Positioning, Structuring and Controlling with Nanoprecision."

Regine Hedderich et al. (2010)

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DOI: 10.1007/978-3-642-11598-1_26

access: open

type: Conference or Workshop Paper

metadata version: 2018-06-26

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Regine Hedderich, Tobias Heiler, Roland Gröger, Thomas Schimmel, Stefan Walheim:
Positioning, Structuring and Controlling with Nanoprecision. IPAS 2010: 222-226

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