"Design, Fabrication and Testing of Assembly Features for Enabling ..."

J. F. C. van Gurp, Marcel Tichem, Urs Staufer (2012)

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DOI: 10.1007/978-3-642-28163-1_3

access: open

type: Conference or Workshop Paper

metadata version: 2022-10-02

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J. F. C. van Gurp, Marcel Tichem, Urs Staufer:
Design, Fabrication and Testing of Assembly Features for Enabling Sub-micron Accurate Passive Alignment of Photonic Chips on a Silicon Optical Bench. IPAS 2012: 17-27

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