"Towards Zero-Defect Manufacturing in the Silicon Wafer Production Through ..."

Federica Acerbi et al. (2023)

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DOI: 10.1007/978-3-031-62582-4_32

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-04

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Federica Acerbi, Andrea Pranzo, Cristina Sanna, Marco Spaltini, Marco Taisch:
Towards Zero-Defect Manufacturing in the Silicon Wafer Production Through Calibration Measurement Process: An Italian Case. PLM (2) 2023: 355-364

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