"Moving MEMS into Mainstream Applications: The MEMSCAP Solution."

K. Liateni et al. (1999)

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type: Conference or Workshop Paper

metadata version: 2003-09-19

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K. Liateni, D. Moulinier, B. Affour, A. Delpoux, Jean-Michel Karam:
Moving MEMS into Mainstream Applications: The MEMSCAP Solution. VLSI 1999: 544-556

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