"CAE Environment for Electromechanical Microsystems."

R. Lerch, Manfred Kaltenbacher, H. Landes (1999)

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type: Conference or Workshop Paper

metadata version: 2021-06-18

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R. Lerch, Manfred Kaltenbacher, H. Landes:
CAE Environment for Electromechanical Microsystems. VLSI 1999: 521-532

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