"Noise optimisation of a piezoresistive CMOS MEMS for magnetic field sensing."

Vincent Beroulle et al. (2001)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2002-08-13

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Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet:
Noise optimisation of a piezoresistive CMOS MEMS for magnetic field sensing. VLSI-SOC 2001: 461-472

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