"Single-Step Laser Fabrication of 3D Free-Standing Origami MEMS Thermal Sensor."

Mohammad Nizar Mohamed Zukri et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10785084

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-04

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Mohammad Nizar Mohamed Zukri, Muhammad Salman Al Farisi, Yoshihiro Hasegawa, Mitsuhiro Shikida:
Single-Step Laser Fabrication of 3D Free-Standing Origami MEMS Thermal Sensor. IEEE SENSORS 2024: 1-4

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