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"Performance of a Monolithic E-Nose Array Integrating MEMS and ALD Processing."
Yilu Zhou et al. (2023)
- Yilu Zhou, James Dieffenderfer, Erdem Sennik, Mahaboobbatcha Aleem, Jakob Speight, Shrey Vasisht, Ömer Oralkan, Bongmook Lee, Veena Misra:
Performance of a Monolithic E-Nose Array Integrating MEMS and ALD Processing. SENSORS 2023: 1-4
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