"Achieving Submicron Sphericity in Bowl-Shaped Micro Hemispherical ..."

Yinan Zhang et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10324852

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-25

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Yinan Zhang, Ruixue Zhang, Haoyu Gu, Bin Zhou, Qi Wei, Rong Zhang:
Achieving Submicron Sphericity in Bowl-Shaped Micro Hemispherical Resonators Through Precision Molding Process. SENSORS 2023: 1-4

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