"Experimental Study of pre-Stressed Micromechanical anti-Spring Structures."

Hongcai Zhang et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956552

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Hongcai Zhang, Yuxing Duan, Yang Gao, Xueyong Wei:
Experimental Study of pre-Stressed Micromechanical anti-Spring Structures. IEEE SENSORS 2019: 1-4

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