"A Temperature-Insensitive Micromachined Resonant Accelerometer with ..."

Yonggang Yin et al. (2018)

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DOI: 10.1109/ICSENS.2018.8630282

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-19

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Yonggang Yin, Zhengxiang Fang, Jingxin Dong, Yunfeng Liu, Fengtian Han:
A Temperature-Insensitive Micromachined Resonant Accelerometer with Thermal Stress Isolation. IEEE SENSORS 2018: 1-4

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