"A Metaplate in MEMS for innovative applications: vibration isolation and ..."

Zhichao Yao et al. (2020)

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DOI: 10.1109/SENSORS47125.2020.9278691

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Zhichao Yao, Valentina Zega, Yan Su, Alberto Corigliano:
A Metaplate in MEMS for innovative applications: vibration isolation and tunable mechanical filters. IEEE SENSORS 2020: 1-4

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