"An All-Silicon Double Differential MEMS Accelerometer with Improved ..."

Wei Xu et al. (2018)

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DOI: 10.1109/ICSENS.2018.8589688

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-19

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Wei Xu, Bin Tang, Guofen Xie, Jie Yang:
An All-Silicon Double Differential MEMS Accelerometer with Improved Thermal Stability. IEEE SENSORS 2018: 1-4

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