"Influence of Scallops in Deep Reactive Ion Etching on Vertical Comb-Based ..."

Yuhu Xia et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10785232

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-04

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Yuhu Xia, Biyun Ling, Bo Chen, Xiaoyue Wang, Biqing Zhou, Yaming Wu:
Influence of Scallops in Deep Reactive Ion Etching on Vertical Comb-Based Sensors/Actuators. IEEE SENSORS 2024: 1-4

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