"Room temperature sensing of VOCs by atomic layer deposition of metal oxide."

Akhilesh Tanneeru et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808786

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-03

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Akhilesh Tanneeru, Steven Mills, Michael Lim, Marzana Mantasha Mahmud, James Dieffenderfer, Alper Bozkurt, H. Troy Nagle, Bongmook Lee, Veena Misra:
Room temperature sensing of VOCs by atomic layer deposition of metal oxide. IEEE SENSORS 2016: 1-3

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