"A novel monolithic array of multiple metal oxide sensors for E-Nose ..."

Akhilesh Tanneem et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956877

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Akhilesh Tanneem, Fatma Patlar Akbulut, Bongmook Lee, Veena Misra:
A novel monolithic array of multiple metal oxide sensors for E-Nose applications via selective on-chip annealing of nanolayered ALD stacks. IEEE SENSORS 2019: 1-4

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