"Thin Film PZT Multimode Resonant MEMS Temperature Sensor."

Wen Sui et al. (2022)

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DOI: 10.1109/SENSORS52175.2022.9967330

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-12

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Wen Sui, Tahmid Kaisar, Haoran Wang, Yihao Wu, Jaesung Lee, Huikai Xie, Philip X.-L. Feng:
Thin Film PZT Multimode Resonant MEMS Temperature Sensor. IEEE SENSORS 2022: 1-4

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