"Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined ..."

Chris Stoeckel et al. (2018)

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DOI: 10.1109/ICSENS.2018.8589845

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Chris Stoeckel, Katja Meinel, Marcel Melzer, Thomas Otto:
Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers. IEEE SENSORS 2018: 1-4

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