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"High-Performance MEMS Pressure Sensor Fully-Integrated with a 3-Axis ..."
Frédéric Souchon et al. (2019)
- Frédéric Souchon, Loic Joët, Carine Ladner, Patrice Rey, Stephan Louwers:
High-Performance MEMS Pressure Sensor Fully-Integrated with a 3-Axis Accelerometer. IEEE SENSORS 2019: 1-4
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