"A Simplified Analytical Damping Constant Model for Perforated Proof Mass ..."

Kohei Shibata et al. (2021)

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DOI: 10.1109/SENSORS47087.2021.9639863

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-15

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Kohei Shibata, Akihiro Uchiyama, Akira Onishi, Shinichi Iida, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu, Hiroyuki Ito:
A Simplified Analytical Damping Constant Model for Perforated Proof Mass Structure of MEMS Capacitive Accelerometer by Multi-Layer Metal Technology. IEEE SENSORS 2021: 1-4

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