"A Fully Integrated Miniatured Capacitive Angle Encoder based on MEMS ..."

Jiahui Shi et al. (2022)

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DOI: 10.1109/SENSORS52175.2022.9967081

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-25

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Jiahui Shi, Hua Liao, Bowen Xing, Bin Zhou, Qi Wei, Rong Zhang:
A Fully Integrated Miniatured Capacitive Angle Encoder based on MEMS Fabrication and ASIC Implementation. IEEE SENSORS 2022: 1-4

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