"Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection ..."

Yuki Sakakihara et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956814

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Yuki Sakakihara, Kazuki Watatani, Kyohei Terao, Fusao Shimokawa, Hidekuni Takao:
Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement Surface. IEEE SENSORS 2019: 1-4

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