"Fabrication of stress-free MEMS structures with a modified SOI-on-glass."

Jayaprakash Reddy, Rudra Pratap (2016)

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DOI: 10.1109/ICSENS.2016.7808653

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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Jayaprakash Reddy, Rudra Pratap:
Fabrication of stress-free MEMS structures with a modified SOI-on-glass. IEEE SENSORS 2016: 1-3

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