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"A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side ..."
Ziqiang Qu et al. (2020)
- Ziqiang Qu, Huafeng Liu, Hao Ouyang, Chenyuan Hu, Liang Cheng Tu:
A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining. IEEE SENSORS 2020: 1-4
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