"Frequency output MEMS resonator on membrane pressure sensors."

Vahid Qaradaghi et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808883

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-28

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Vahid Qaradaghi, Mohammad Mahdavi, Varun Kumar, Siavash Pourkamali:
Frequency output MEMS resonator on membrane pressure sensors. IEEE SENSORS 2016: 1-3

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