"Vacuum-assisted selective adhesive imprinting for heterogeneous system ..."

Jaka Pribosek et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956807

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Jaka Pribosek, Markus Zauner, Jochen Bardong, Alfred Binder, Paul Maierhofer, Alexander Bergmann, Georg Röhrer:
Vacuum-assisted selective adhesive imprinting for heterogeneous system integration of MOEMS devices : Automated assembly of miniaturized PM sensor. IEEE SENSORS 2019: 1-3

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