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"Fabrication and Experimental Characterization of a MEMS Microphone Using ..."
Mehmet Ozdogan, Shahrzad Towfighian, Ronald N. Miles (2019)
- Mehmet Ozdogan, Shahrzad Towfighian, Ronald N. Miles:
Fabrication and Experimental Characterization of a MEMS Microphone Using Electrostatic Levitation. IEEE SENSORS 2019: 1-4
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